Microsystem Technology

R4176,29

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.

Authors

, ,

Language

Publisher

ISBN

9783527613014

Number Of Pages

512

File Size

36.73 mb

Format

PDF

Edition

1

Published

11-07-2008